Combinatorial growth of multinary nanostructured thin functional films

The rapid generation of material libraries with multidimensional gradients is important for the discovery new functional materials. Here we report an integrated fabrication scheme, based on glancing angle physical vapor deposition, to form a thin-film materials library controlled variations in nanoshape, multinary composition, and oxidation state single large area substrate. We demonstrate versatility method by growing octonary system, which characterize high-throughput methods, reveal several physico-chemical properties. Among others, examine frame oxygen evolution reaction show that nanostructuring leads NiO clusters are active towards such reaction. Our scheme can be readily extended include more starting elements, transferred other deposition making this adaptable versatile platform combinatorial science.